The metalens meets the stars

Metalenses have been used to image microscopic features of tissue and resolve details smaller than a wavelength of light. Now they are going bigger.

Researchers at the Harvard John A. Paulson School of Engineering and Applied Sciences (SEAS) have developed a 10-centimeter-diameter glass metalens that can image the sun, the moon and distant nebulae with high resolution.

It is the first all-glass, large-scale metalens in the visible wavelength that can be mass produced using conventional CMOS fabrication technology.

The research is published in ACS Nano.

"The ability to accurately control the size of tens of billions of nanopillars over an unprecedentedly large flat lens using state-of-the-art semiconductor foundry processes is a nanofabrication feat that opens exciting new opportunities for space science and technology," said Federico Capasso, the Robert L. Wallace Professor of Applied Physics and Vinton Hayes Senior Research Fellow in Electrical Engineering at SEAS and senior author of the paper.

Most flat metalenses, which use millions of pillar-like nanostructures to focus light, are about the size of a piece of glitter.

In 2019, Capasso and his team developed a centimeter-scale metalens using a technique called deep-ultraviolet (DUV) projection lithography,which projects and forms a nanostructure pattern that can be directly etched into the glass wafer, eliminating the time-consuming writing and deposition processes that were required for previous metalenses.

DUV projection lithography is commonly used to pattern fine lines and shapes in silicon chips for smartphones and computers.

Joon-Suh Park, a former graduate student at SEAS and current postdoctoral fellow in Capasso's team, demonstrated that the technique could not only be used to mass produce metalenses but also increase their size for applications in virtual and augmented reality.

But making the metalens even larger for applications in astronomy and free-space optical communications posed an engineering problem.

"There is a major limitation with the lithography tool because these tools are used to make computer chips, so chip size is restricted to no more than 20 to 30 millimeters," said Park, co-first author of the paper.

"In order to make a 100-millimeter diameter lens, we needed to find a way around this limitation."

Park and the team developed a technique to stitch together several patterns of nanopillars using the DUV projection lithography tool.

By dividing the lens into 25 sections but using only the 7 sections of a quadrant considering the rotational symmetry, the researchers showed that DUV projection lithography could pattern 18.7 billion designed nanostructures onto a 10-centimeter circular area in a matter of minutes.

The team also developed a vertical glass etching technique that allows the creation of high-aspect ratio, smooth-sidewall nanopillars etched into glass.

"Using the same DUV projection lithography, one could produce large-diameter, aberration-correcting meta-optics or even larger lenses on larger glass diameter wafers as the corresponding CMOS foundry tools become increasingly available in the industry," said Soon Wei Daniel Lim, a postdoctoral fellow at SEAS and co-first author of the paper.

Lim played a lead role in the full simulation and characterization of all the possible fabrication errors that could arise during mass-manufacturing processes and how they could impact the optical performance of metalenses.

After addressing possible manufacturing challenges, the researchers demonstrated the power of the metalens in imaging celestial objects.

Mounting the metalens on a tripod with a color filter and camera sensor, Park and the team took to the roof of Harvard's Science Center.

There, they imaged the Sun, the moon and the North America nebula, a dim nebula in the constellation Cygnus about 2,590 light years away.

"We were able to get very detailed images of the Sun, the moon and the nebula that are comparable to images taken by conventional lenses" said Arman Amirzhan, a graduate student in the Capasso Lab and co-author of the paper.

Using only the metalens, the researchers were able to image the same cluster of sunspots as a NASA image taken that same day.

The team also demonstrated that the lens could survive exposure to extreme heat, extreme cold and the intense vibrations that would occur during a space launch without any damage or loss in optical performance.

Because of its size and monolithic glass composition, the lens could also be used for long-range telecommunications and directed energy transport applications.

Read more at Science Daily

Flat, pancake-sized metalens images lunar surface in an engineering first

Astronomers and amateurs alike know the bigger the telescope, the more powerful the imaging capability. To keep the power but streamline one of the bulkier components, a Penn State-led research team created the first ultrathin, compact metalens telescope capable of imaging far-away objects, including the moon.

Metalenses comprise tiny, antenna-like surface patterns that can focus light to magnify distant objects in the same way as traditional curved glass lenses, but they have the advantage of being flat. Though small, millimeters-wide metalenses have been developed in the past, the researchers scaled the size of the lens to eight centimeters in diameter, or about four inches wide, making it possible to use in large optical systems, such as telescopes. They published their approach in Nano Letters.

"Traditional camera or telescope lenses have a curved surface of varying thickness, where you have a bump in the middle and thinner edges, which causes the lens to be bulky and heavy," said corresponding author Xingjie Ni, associate professor of electrical engineering and computer science at Penn State. "Metalenses use nano-structures on the lens instead of curvature to contour light, which allows them to lay flat."

That is one of the reasons, Ni said, modern cellphone camera lenses protrude from the body of the phone: the thickness of the lenses take up space, though they appear flat since they are hidden behind a glass window.

Metalenses are typically made using electron beam lithography, which involves scanning a focused beam of electrons onto a piece of glass, or other transparent substrate, to create antenna-like patterns point by point. However, the scanning process of the electron beam limits the size of the lens that can be created, as scanning each point is time-consuming and has low throughput.

To create a bigger lens, the researchers adapted a fabrication method known as deep ultraviolet (DUV) photolithography, which is commonly used to produce computer chips.

"DUV photolithography is a high-throughput and high-yield process that can produce many computer chips within seconds," Ni said. "We found this to be a good fabrication method for metalenses because it allows for much larger pattern sizes while still maintaining small details, which allows the lens to work effectively."

The researchers modified the method with their own novel procedure, called rotating wafer and stitching. Researchers divided the wafer, on which the metalens was fabricated, into four quadrants, which were further divided into 22 by 22 millimeter regions -- smaller than a standard postage stamp. Using a DUV lithography machine at Cornell University, they projected a pattern onto one quadrant through projection lenses, which they then rotated by 90 degrees and projected again. They repeated the rotation until all four quadrants were patterned.

"The process is cost-effective because the masks containing the pattern data for each quadrant can be reused due to the rotation symmetry of the metalens," Ni said. "This reduces the manufacturing and environmental costs of the method."

As the size of the metalens increased, the digital files required to process the patterns became significantly larger, which would take a long time for the DUV lithography machine to process. To overcome this issue, the researchers compressed the files using data approximations and by referencing non-unique data.

"We utilized every possible method to reduce the file size," Ni said. "We identified identical data points and referenced existing ones, gradually reducing the data until we had a usable file to send to the machine for creating the metalens."

Using the new fabrication method, the researchers developed a single-lens telescope and captured clear images of the lunar surface -- achieving greater resolution of objects and much farther imaging distance than previous metalenses. Before the technology can be applied to modern cameras, however, researchers must address the issue of chromatic aberration, which causes image distortion and blurriness when different colors of light, which bend in different directions, enter a lens.

"We are exploring smaller and more sophisticated designs in the visible range, and will compensate for various optical aberrations, including chromatic aberration," Ni said.

Read more at Science Daily